Characterization Of Nanoporous Alumina Using Terahertz Time Domain ReflectometryPoster (MATL-P2)
Tue, 10 Nov 2020 01:15am to 03:00am
In this work, The nanoporous Al2O3 films with various thickness were formed on Al substrates with a two-step anodization process. The birefringence of the nanoporous Al2O3 were also studied using the polarization-sensitive THz spectroscopy. Due to the optical thin of grown NP Al2O3 film, sparse deconvolution was applied to characterize the structure of nanoporous Al2O3 film. The calculated thicknesses based on deconvolved results match well with the value obtained from destructive cross-sectional FE-SEM, confirming the potential of THz reflectometry for the characterization of such nanostructured films.
Authors: zhai, min; Locquet, Alexandre; Citrin, David
Georgia tech Lorraine