Comparison Of Optoelectronic Time- And Frequency-Domain Systems For Single- And Multilayer Thickness Measurements

Paper (MM5)

Fri, 13 Nov 2020 03:15pm to 03:30pm

Room: Canalside

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We present the first comparison of optoelectronic frequency- and time-domain terahertz (THz) systems for thickness measurements on sub-mm single- and multilayer samples using identical setups, samples and evaluation procedures in order to obtain comparable results. We find that single layer PET and Kapton foils with a thickness of 23 m — 350 m can be measured with similar accuracy with both systems. Hence, frequency-domain THz systems may replace time-domain systems in future industrial layer thickness measurements.

Presenters and Authors Info

Presenter: Anonymous

Authors: Liebermeister, Lars; Nellen, Simon; Kohlhaas, Robert B.; Lauck, Sebastian; Deumer, Milan; Breuer, Steffen; Globisch, Björn

Fraunhofer Heinrich Hertz Institute