Enhancement Of Indium Tin Oxide Nano-Scale Films For Terahertz Device Applications Treated By Rapid Thermal Annealing

Poster (MATL-P5)

Fri, 13 Nov 2020 01:15am to 03:00am

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In this paper, we tune the terahertz (THz) optical and electrical properties of indium tin oxide (ITO) nano-thick film by rapid thermal annealing (RTA). Besides, thickness-dependent THz transmittance properties of as-deposited ITO thin film is investigated. The ITO film can be functioned as a THz reflective conductive electrodes by RTA at 600Ã,°C. THz power transmittance improved from 6 to 49 % at 0.2 THz by RTA at 800Ã,°C. Furthermore, we extracted complex refractive indices of as sputtered and annealed ITO films, and fitted the results with the Drude model. Additionally, the structural and morphological properties of ITO samples are presented.

Download Abstract: fintsocimtw-thz2020-4882973-posterpaperid4882973itotds.pdf

Presenters and Authors Info

Presenter: Anonymous

Authors: Sahoo, Anup Kumar; Mai, Chia-Ming; Pan, Ci-Ling

National Tsing Hua University