Flip-chip Interconnection Between Nb5N6 Terahertz Array Detectors And Readout Circuits

Poster (OPTO-P1)

Wed, 11 Nov 2020 01:15am to 03:00am

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Event Picture:

Nb5N6 microbolometer is a high sensitive terahertz detector at room temperature, but its integrated air cavity structure increases the difficulty of interconnection with readout circuit. For this reason, we optimized the flip chip process and successfully realized the interconnection between 32 Ãf- 32 array devices and readout circuits.

Download Abstract: pid6596137.pdf

Presenters and Authors Info

Presenter: Anonymous

Authors: Li, Zhenjie; Guo, Xinle; Zhang, Jinfeng; Pan, Danfeng; Tu, Xuecou; Jia, Xiaoqing; Kang, Lin; Chen, Jian; Wu, Peiheng

Nanjing Univeristy