Sheet Conductance Measurement Of Thin Metal Films Using THz-TDS

Paper (MM5)

Fri, 13 Nov 2020 03:30pm to 03:45pm

Room: Canalside

Attend in Zoom

Recent research shows interest in ruthenium as a barrier layer in copper based electronic interconnects. In this work, the sheet conductance of ruthenium and copper ultra-thin metal films was measured using both micro four-point probe and reflection mode teraherz time-domain spectroscopy based methods. The agreement between the two methods places reflection mode terahertz time-domain spectroscopy as a viable tool for ultra-thin metal film analysis.

Presenters and Authors Info

Presenter: Anonymous

Authors: Kelner, Roy; Buron, Jonas Due; Jepsen, Peter Uhd

Capres – a KLA Company, Technical University of Denmark