Supercritical Fluid Deposition Technique Enabling Metallic Coating Onto 3D-printed Polymer For Fabrication Of High-aspect-ratio THz DevicesPoster (INST-P3)
Wed, 11 Nov 2020 01:15am to 03:00am
Three-dimensional (3D) terahertz devices often have difficulty of fabrication due to smaller feature size and complexity of architecture. We herein propose the new fabrication method by combining two techniques; building 3D polymer architecture using high-resolution 3D printing, followed by coating its surface with metal film using high-step-coverage deposition technique, supercritical fluid deposition (SCFD). Difficulty of metal film formation by SCFD onto the polymer is the largest obstacle, but was overcome by a facile surface modification technique to anneal the polymer in oxygen ambient.
Authors: Momose, Takeshi; Konishi, Kuniaki; Zhao, Yu; Morishita, Hirotaka; Tsuchida, Tetsuya; Huang, Yuyuan; Yasukochi, Hiroyuki; Soeda, Kentaro; Deura, Momoko; Shimoyama, Yusuke; Yumoto, Junji; Kuwata-Gonokami, Makoto; Shimogaki, Yukihiro
The University of Tokyo