THz Based Ultrahigh Temperature Measurement Of SiliconPaper (MM3)
Wed, 11 Nov 2020 03:45pm to 04:00pm
We present the temperature dependence of the reflectivity of silicon in the THz range. These are the first attempts, to our knowledge, of implementing THz technology to make a noncontact thermometer for semiconductors.
Authors: Madhi, Daena; Pedersen, Asger Kjærgård; Jepsen, Peter Uhd; Petersen, Dirch Hjorth; Mirosnikov, Daniil
Technical University of Denmark, Topsil GlobalWafers A/S