THz Based Ultrahigh Temperature Measurement Of Silicon

Paper (MM3)

Wed, 11 Nov 2020 03:45pm to 04:00pm

Room: Canalside

Attend in Zoom

We present the temperature dependence of the reflectivity of silicon in the THz range. These are the first attempts, to our knowledge, of implementing THz technology to make a noncontact thermometer for semiconductors.

Presenters and Authors Info

Presenter: Anonymous

Authors: Madhi, Daena; Pedersen, Asger Kjærgård; Jepsen, Peter Uhd; Petersen, Dirch Hjorth; Mirosnikov, Daniil

Technical University of Denmark, Topsil GlobalWafers A/S