Wafer-scale Inspection Of Graphene Conductivity By THz Near-fieldscanning: As-grown On Sapphire And After Transfer To SiO2/Si

Poster (MATL-P5)

Fri, 13 Nov 2020 01:15am to 03:00am

Room: Exhibit/Poster Hall

Attend in Zoom

Event Picture:

We present THz near-field transmission measurements
for CVD-grown 2” graphene mono-layer on sapphire before and
after transfer to SiO2/Si substrate. The capability to detect changes
in the graphene electronic properties after the transfer reveal the
potential of THz-measurements as a non-destructive inspection
tool for large scale samples with micron-scale resolution.

Presenters and Authors Info

Presenter: Anonymous

Authors: Michalski, Alexander; Sawallich, Simon; Krotkus, Simonas; Pandey, Himadri; Satender, Kataria; Heuken, Michael; Nagel, Michael; Lemme, Max

AIXTRON SE, AMO GmbH, ELD - RWTH Aachen University, Protemics GmbH